Electrical Characterization of Microelectromechanical Silicon Carbide Resonators

This manuscript describes the findings of a study to investigate the performance of SiC MEMS resonators with respect to resonant frequency and quality factor under a variety of testing conditions, including various ambient pressures, AC drive voltages, bias potentials and temperatures. The sample se...

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Detalles Bibliográficos
Autores principales: Chang, Wen-Teng, Zorman, Christian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2008
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3705528/
https://www.ncbi.nlm.nih.gov/pubmed/27873838
http://dx.doi.org/10.3390/s8095759

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3705528/
https://www.ncbi.nlm.nih.gov/pubmed/27873838
http://dx.doi.org/10.3390/s8095759

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