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Direct Prototyping of Patterned Nanoporous Carbon: A Route from Materials to On-chip Devices

Prototyping of nanoporous carbon membranes with three-dimensional microscale patterns is significant for integration of such multifunctional materials into various miniaturized systems. Incorporating nano material synthesis into microelectronics technology, we present a novel approach to direct prot...

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Detalles Bibliográficos
Autores principales: Shen, Caiwei, Wang, Xiaohong, Zhang, Wenfeng, Kang, Feiyu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3724177/
https://www.ncbi.nlm.nih.gov/pubmed/23887486
http://dx.doi.org/10.1038/srep02294