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Direct Prototyping of Patterned Nanoporous Carbon: A Route from Materials to On-chip Devices
Prototyping of nanoporous carbon membranes with three-dimensional microscale patterns is significant for integration of such multifunctional materials into various miniaturized systems. Incorporating nano material synthesis into microelectronics technology, we present a novel approach to direct prot...
Autores principales: | Shen, Caiwei, Wang, Xiaohong, Zhang, Wenfeng, Kang, Feiyu |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3724177/ https://www.ncbi.nlm.nih.gov/pubmed/23887486 http://dx.doi.org/10.1038/srep02294 |
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