Digging gold: keV He(+) ion interaction with Au

Helium ion microscopy (HIM) was used to investigate the interaction of a focused He(+) ion beam with energies of several tens of kiloelectronvolts with metals. HIM is usually applied for the visualization of materials with extreme surface sensitivity and resolution. However, the use of high ion flue...

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Detalles Bibliográficos
Autores principales: Veligura, Vasilisa, Hlawacek, Gregor, Berkelaar, Robin P, van Gastel, Raoul, Zandvliet, Harold J W, Poelsema, Bene
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2013
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3740815/
https://www.ncbi.nlm.nih.gov/pubmed/23946914
http://dx.doi.org/10.3762/bjnano.4.53

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3740815/
https://www.ncbi.nlm.nih.gov/pubmed/23946914
http://dx.doi.org/10.3762/bjnano.4.53

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