Stability, Nonlinearity and Reliability of Electrostatically Actuated MEMS Devices

Electrostatic micro-electro-mechanical system (MEMS) is a special branch with a wide range of applications in sensing and actuating devices in MEMS. This paper provides a survey and analysis of the electrostatic force of importance in MEMS, its physical model, scaling effect, stability, nonlinearity...

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Detalles Bibliográficos
Autores principales: Zhang, Wen-Ming, Meng, Guang, Chen, Di
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2007
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3785698/

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3785698/

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