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A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors

This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress indu...

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Detalles Bibliográficos
Autores principales: Ansari, Mohd. Zahid, Cho, Chongdu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2008
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3787459/
https://www.ncbi.nlm.nih.gov/pubmed/27873943
http://dx.doi.org/10.3390/s8117530