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A Study on Increasing Sensitivity of Rectangular Microcantilevers Used in Biosensors
This study proposes a new microcantilever design with a rectangular hole at the fixed end of the cantilever that is more sensitive than conventional ones. A commercial finite element analysis software ANSYS is used to analyze it. The Stoney equation is first used to calculate the surface stress indu...
Autores principales: | , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2008
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3787459/ https://www.ncbi.nlm.nih.gov/pubmed/27873943 http://dx.doi.org/10.3390/s8117530 |