Laser confocal feedback tomography and nano-step height measurement

A promising method for tomography and step height measurement is proposed, which combines the high sensitivity of the frequency-shifted feedback laser and the axial positioning ability of confocal microscopy. By demodulating the feedback-induced intensity modulation signals, the obtained amplitude a...

Descripción completa

Detalles Bibliográficos
Autores principales: Tan, Yidong, Wang, Weiping, Xu, Chunxin, Zhang, Shulian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3804889/
https://www.ncbi.nlm.nih.gov/pubmed/24145717
http://dx.doi.org/10.1038/srep02971

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3804889/
https://www.ncbi.nlm.nih.gov/pubmed/24145717
http://dx.doi.org/10.1038/srep02971

Ejemplares similares