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Fabrication of Smooth Patterned Structures of Refractory Metals, Semiconductors, and Oxides via Template Stripping

[Image: see text] The template-stripping method can yield smooth patterned films without surface contamination. However, the process is typically limited to coinage metals such as silver and gold because other materials cannot be readily stripped from silicon templates due to strong adhesion. Herein...

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Detalles Bibliográficos
Autores principales: Park, Jong Hyuk, Nagpal, Prashant, McPeak, Kevin M., Lindquist, Nathan C., Oh, Sang-Hyun, Norris, David J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2013
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3805313/
https://www.ncbi.nlm.nih.gov/pubmed/24001174
http://dx.doi.org/10.1021/am402756d