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Fabrication of Smooth Patterned Structures of Refractory Metals, Semiconductors, and Oxides via Template Stripping
[Image: see text] The template-stripping method can yield smooth patterned films without surface contamination. However, the process is typically limited to coinage metals such as silver and gold because other materials cannot be readily stripped from silicon templates due to strong adhesion. Herein...
Autores principales: | Park, Jong Hyuk, Nagpal, Prashant, McPeak, Kevin M., Lindquist, Nathan C., Oh, Sang-Hyun, Norris, David J. |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
American Chemical Society
2013
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Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3805313/ https://www.ncbi.nlm.nih.gov/pubmed/24001174 http://dx.doi.org/10.1021/am402756d |
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