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Desktop Nanofabrication with Massively Multiplexed Beam Pen Lithography
The development of a lithographic method that can rapidly define nanoscale features across centimeter-scale surfaces has been a long standing goal of the nanotechnology community. If such a ‘desktop nanofab’ could be implemented in a low-cost format, it would bring the possibility of point-of-use na...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3807695/ https://www.ncbi.nlm.nih.gov/pubmed/23868336 http://dx.doi.org/10.1038/ncomms3103 |