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An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging

A ∼1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density...

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Detalles Bibliográficos
Autores principales: Yang, Yi, Tian, He, Wang, Yu-Feng, Shu, Yi, Zhou, Chang-Jian, Sun, Hui, Zhang, Cang-Hai, Chen, Hao, Ren, Tian-Ling
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3812571/
https://www.ncbi.nlm.nih.gov/pubmed/23896705
http://dx.doi.org/10.3390/s130809624