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An Ultra-High Element Density pMUT Array with Low Crosstalk for 3-D Medical Imaging
A ∼1 MHz piezoelectric micromachined ultrasonic transducer (pMUT) array with ultra-high element density and low crosstalk is proposed for the first time. This novel pMUT array is based on a nano-layer spin-coating lead zirconium titanium film technique and can be fabricated with high element density...
Autores principales: | Yang, Yi, Tian, He, Wang, Yu-Feng, Shu, Yi, Zhou, Chang-Jian, Sun, Hui, Zhang, Cang-Hai, Chen, Hao, Ren, Tian-Ling |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Molecular Diversity Preservation International (MDPI)
2013
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3812571/ https://www.ncbi.nlm.nih.gov/pubmed/23896705 http://dx.doi.org/10.3390/s130809624 |
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