Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm

We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr(0.52)Ti(0.48))O(3) (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was cont...

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Detalles Bibliográficos
Autores principales: Wang, Zhihong, Yao, Yingbang, Wang, Xianbin, Yue, Weisheng, Chen, Longqing, Zhang, Xi Xiang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3816290/
https://www.ncbi.nlm.nih.gov/pubmed/24185198
http://dx.doi.org/10.1038/srep03127

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3816290/
https://www.ncbi.nlm.nih.gov/pubmed/24185198
http://dx.doi.org/10.1038/srep03127

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