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Bending-induced electromechanical coupling and large piezoelectric response in a micromachined diaphragm
We investigated the dependence of electromechanical coupling and the piezoelectric response of a micromachined Pb(Zr(0.52)Ti(0.48))O(3) (PZT) diaphragm on its curvature by observing the impedance spectrum and central deflection responses to a small AC voltage. The curvature of the diaphragm was cont...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3816290/ https://www.ncbi.nlm.nih.gov/pubmed/24185198 http://dx.doi.org/10.1038/srep03127 |