An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process

In this study, a miniaturized high fundamental frequency quartz crystal microbalance (QCM) is fabricated for sensor applications using a wet etching technique. The vibration area is reduced in the fabrication of the high frequency QCM with an inverted mesa structure. To reduce the complexity of the...

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Detalles Bibliográficos
Autores principales: Liang, Jinxing, Huang, Jia, Zhang, Tian, Zhang, Jing, Li, Xuefeng, Ueda, Toshitsugu
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3821337/
https://www.ncbi.nlm.nih.gov/pubmed/24025559
http://dx.doi.org/10.3390/s130912140

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3821337/
https://www.ncbi.nlm.nih.gov/pubmed/24025559
http://dx.doi.org/10.3390/s130912140

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