Quantum Limit of Quality Factor in Silicon Micro and Nano Mechanical Resonators

Micromechanical resonators are promising replacements for quartz crystals for timing and frequency references owing to potential for compactness, integrability with CMOS fabrication processes, low cost, and low power consumption. To be used in high performance reference application, resonators shoul...

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Detalles Bibliográficos
Autores principales: Ghaffari, Shirin, Chandorkar, Saurabh A., Wang, Shasha, Ng, Eldwin J., Ahn, Chae H., Hong, Vu, Yang, Yushi, Kenny, Thomas W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3832850/
https://www.ncbi.nlm.nih.gov/pubmed/24247809
http://dx.doi.org/10.1038/srep03244

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3832850/
https://www.ncbi.nlm.nih.gov/pubmed/24247809
http://dx.doi.org/10.1038/srep03244

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