Multi-scale Analysis of MEMS Sensors Subject to Drop Impacts

The effect of accidental drops on MEMS sensors are examined within the framework of a multi-scale finite element approach. With specific reference to a polysilicon MEMS accelerometer supported by a naked die, the analysis is decoupled into macro-scale (at die length-scale) and meso-scale (at MEMS le...

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Detalles Bibliográficos
Autores principales: Mariani, Stefano, Ghisi, Aldo, Corigliano, Alberto, Zerbini, Sarah
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2007
Materias:
Full Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3841848/
https://www.ncbi.nlm.nih.gov/pubmed/28903199

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3841848/
https://www.ncbi.nlm.nih.gov/pubmed/28903199

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