Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry

Absolute flatness of three silicon plane mirrors have been measured by a three-intersection method based on the three-flat method using a near-infrared interferometer. The interferometer was constructed using a near-infrared laser diode with a 1,310-nm wavelength light where the silicon plane mirror...

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Detalles Bibliográficos
Autores principales: Uchikoshi, Junichi, Hayashi, Yoshinori, Ajari, Noritaka, Kawai, Kentaro, Arima, Kenta, Morita, Mizuho
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3848466/
https://www.ncbi.nlm.nih.gov/pubmed/23758916
http://dx.doi.org/10.1186/1556-276X-8-275

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3848466/
https://www.ncbi.nlm.nih.gov/pubmed/23758916
http://dx.doi.org/10.1186/1556-276X-8-275

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