Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry

Absolute flatness of three silicon plane mirrors have been measured by a three-intersection method based on the three-flat method using a near-infrared interferometer. The interferometer was constructed using a near-infrared laser diode with a 1,310-nm wavelength light where the silicon plane mirror...

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Detalles Bibliográficos
Autores principales: Uchikoshi, Junichi, Hayashi, Yoshinori, Ajari, Noritaka, Kawai, Kentaro, Arima, Kenta, Morita, Mizuho
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3848466/
https://www.ncbi.nlm.nih.gov/pubmed/23758916
http://dx.doi.org/10.1186/1556-276X-8-275
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author Uchikoshi, Junichi
Hayashi, Yoshinori
Ajari, Noritaka
Kawai, Kentaro
Arima, Kenta
Morita, Mizuho
author_facet Uchikoshi, Junichi
Hayashi, Yoshinori
Ajari, Noritaka
Kawai, Kentaro
Arima, Kenta
Morita, Mizuho
author_sort Uchikoshi, Junichi
collection PubMed
description Absolute flatness of three silicon plane mirrors have been measured by a three-intersection method based on the three-flat method using a near-infrared interferometer. The interferometer was constructed using a near-infrared laser diode with a 1,310-nm wavelength light where the silicon plane mirror is transparent. The height differences at the coordinate values between the absolute line profiles by the three-intersection method have been evaluated. The height differences of the three flats were 4.5 nm or less. The three-intersection method using the near-infrared interferometer was useful for measuring the absolute flatness of the silicon plane mirrors.
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spelling pubmed-38484662013-12-06 Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry Uchikoshi, Junichi Hayashi, Yoshinori Ajari, Noritaka Kawai, Kentaro Arima, Kenta Morita, Mizuho Nanoscale Res Lett Nano Express Absolute flatness of three silicon plane mirrors have been measured by a three-intersection method based on the three-flat method using a near-infrared interferometer. The interferometer was constructed using a near-infrared laser diode with a 1,310-nm wavelength light where the silicon plane mirror is transparent. The height differences at the coordinate values between the absolute line profiles by the three-intersection method have been evaluated. The height differences of the three flats were 4.5 nm or less. The three-intersection method using the near-infrared interferometer was useful for measuring the absolute flatness of the silicon plane mirrors. Springer 2013-06-07 /pmc/articles/PMC3848466/ /pubmed/23758916 http://dx.doi.org/10.1186/1556-276X-8-275 Text en Copyright © 2013 Uchikoshi et al.; licensee Springer. http://creativecommons.org/licenses/by/2.0 This is an Open Access article distributed under the terms of the Creative Commons Attribution License (http://creativecommons.org/licenses/by/2.0), which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
spellingShingle Nano Express
Uchikoshi, Junichi
Hayashi, Yoshinori
Ajari, Noritaka
Kawai, Kentaro
Arima, Kenta
Morita, Mizuho
Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
title Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
title_full Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
title_fullStr Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
title_full_unstemmed Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
title_short Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
title_sort absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
topic Nano Express
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3848466/
https://www.ncbi.nlm.nih.gov/pubmed/23758916
http://dx.doi.org/10.1186/1556-276X-8-275
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