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Absolute flatness measurements of silicon mirrors by a three-intersection method by near-infrared interferometry
Absolute flatness of three silicon plane mirrors have been measured by a three-intersection method based on the three-flat method using a near-infrared interferometer. The interferometer was constructed using a near-infrared laser diode with a 1,310-nm wavelength light where the silicon plane mirror...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Springer
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3848466/ https://www.ncbi.nlm.nih.gov/pubmed/23758916 http://dx.doi.org/10.1186/1556-276X-8-275 |