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Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process
The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated e...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3859035/ https://www.ncbi.nlm.nih.gov/pubmed/24072022 http://dx.doi.org/10.3390/s131012760 |