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Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process

The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated e...

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Detalles Bibliográficos
Autores principales:	Liao, Wei-Zhen, Dai, Ching-Liang, Yang, Ming-Zhi
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Molecular Diversity Preservation International (MDPI) 2013
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3859035/ https://www.ncbi.nlm.nih.gov/pubmed/24072022 http://dx.doi.org/10.3390/s131012760

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