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Silicon Carbide-Based Hydrogen Gas Sensors for High-Temperature Applications
We investigated SiC-based hydrogen gas sensors with metal-insulator-semiconductor (MIS) structure for high temperature process monitoring and leak detection applications in fields such as the automotive, chemical and petroleum industries. In this work, a thin tantalum oxide (Ta(2)O(5)) layer was exp...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3859079/ https://www.ncbi.nlm.nih.gov/pubmed/24113685 http://dx.doi.org/10.3390/s131013575 |