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Quantitative Boundary Support Characterization for Cantilever MEMS
Microfabrication limitations are of concern especially for suspended Micro-Electro-Mechanical-Systems (MEMS) microstructures such as cantilevers. The static and dynamic qualities of such microscale devices are directly related to the invariant and variant properties of the microsystem. Among the inv...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Molecular Diversity Preservation International (MDPI)
2007
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3864509/ https://www.ncbi.nlm.nih.gov/pubmed/28903214 |