Surface passivation and optical characterization of Al(2)O(3)/a-SiC(x) stacks on c-Si substrates

The aim of this work is to study the surface passivation of aluminum oxide/amorphous silicon carbide (Al(2)O(3)/a-SiC(x)) stacks on both p-type and n-type crystalline silicon (c-Si) substrates as well as the optical characterization of these stacks. Al(2)O(3) films of different thicknesses were depo...

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Detalles Bibliográficos
Autores principales: López, Gema, Ortega, Pablo R, Voz, Cristóbal, Martín, Isidro, Colina, Mónica, Morales, Anna B, Orpella, Albert, Alcubilla, Ramón
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Beilstein-Institut 2013
Materias:
Full Research Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3869291/
https://www.ncbi.nlm.nih.gov/pubmed/24367740
http://dx.doi.org/10.3762/bjnano.4.82

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3869291/
https://www.ncbi.nlm.nih.gov/pubmed/24367740
http://dx.doi.org/10.3762/bjnano.4.82

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