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Surface passivation and optical characterization of Al(2)O(3)/a-SiC(x) stacks on c-Si substrates
The aim of this work is to study the surface passivation of aluminum oxide/amorphous silicon carbide (Al(2)O(3)/a-SiC(x)) stacks on both p-type and n-type crystalline silicon (c-Si) substrates as well as the optical characterization of these stacks. Al(2)O(3) films of different thicknesses were depo...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Beilstein-Institut
2013
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3869291/ https://www.ncbi.nlm.nih.gov/pubmed/24367740 http://dx.doi.org/10.3762/bjnano.4.82 |