Design and Implementation of a Micromechanical Silicon Resonant Accelerometer

The micromechanical silicon resonant accelerometer has attracted considerable attention in the research and development of high-precision MEMS accelerometers because of its output of quasi-digital signals, high sensitivity, high resolution, wide dynamic range, anti-interference capacity and good sta...

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Detalles Bibliográficos
Autores principales: Huang, Libin, Yang, Hui, Gao, Yang, Zhao, Liye, Liang, Jinxing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3871141/
https://www.ncbi.nlm.nih.gov/pubmed/24256978
http://dx.doi.org/10.3390/s131115785

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3871141/
https://www.ncbi.nlm.nih.gov/pubmed/24256978
http://dx.doi.org/10.3390/s131115785

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