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A Microsystem Based on Porous Silicon-Glass Anodic Bonding for Gas and Liquid Optical Sensing

We have recently presented an integrated silicon-glass opto-chemical sensor for lab-on-chip applications, based on porous silicon and anodic bonding technologies. In this work, we have optically characterized the sensor response on exposure to vapors of several organic compounds by means of reflecti...

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Detalles Bibliográficos
Autores principales: De Stefano, Luca, Malecki, Krzysztof, Della Corte, Francesco G., Moretti, Luigi, Rea, Ilaria, Rotiroti, Lucia, Rendina, Ivo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2006
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3874676/