Dimension Reduction of Multivariable Optical Emission Spectrometer Datasets for Industrial Plasma Processes

A new data dimension-reduction method, called Internal Information Redundancy Reduction (IIRR), is proposed for application to Optical Emission Spectroscopy (OES) datasets obtained from industrial plasma processes. For example in a semiconductor manufacturing environment, real-time spectral emission...

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Detalles Bibliográficos
Autores principales: Yang, Jie, McArdle, Conor, Daniels, Stephen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2013
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3926546/
https://www.ncbi.nlm.nih.gov/pubmed/24451453
http://dx.doi.org/10.3390/s140100052

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3926546/
https://www.ncbi.nlm.nih.gov/pubmed/24451453
http://dx.doi.org/10.3390/s140100052

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