The Development of Micromachined Gyroscope Structure and Circuitry Technology

This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized i...

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Detalles Bibliográficos
Autores principales: Xia, Dunzhu, Yu, Cheng, Kong, Lun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2014
Materias:
Review
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3926620/
https://www.ncbi.nlm.nih.gov/pubmed/24424468
http://dx.doi.org/10.3390/s140101394

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3926620/
https://www.ncbi.nlm.nih.gov/pubmed/24424468
http://dx.doi.org/10.3390/s140101394

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