Manufacture of Radio Frequency Micromachined Switches with Annealing

The fabrication and characterization of a radio frequency (RF) micromachined switch with annealing were presented. The structure of the RF switch consists of a membrane, coplanar waveguide (CPW) lines, and eight springs. The RF switch is manufactured using the complementary metal oxide semiconductor...

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Detalles Bibliográficos
Autores principales: Lin, Cheng-Yang, Dai, Ching-Liang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3926632/
https://www.ncbi.nlm.nih.gov/pubmed/24445415
http://dx.doi.org/10.3390/s140101680

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3926632/
https://www.ncbi.nlm.nih.gov/pubmed/24445415
http://dx.doi.org/10.3390/s140101680

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