Development of Simple Designs of Multitip Probe Diagnostic Systems for RF Plasma Characterization

Multitip probes are very useful diagnostics for analyzing and controlling the physical phenomena occurring in low temperature discharge plasmas. However, DC biased probes often fail to perform well in processing plasmas. The objective of the work was to deduce simple designs of DC biased multitip pr...

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Detalles Bibliográficos
Autores principales: Naz, M. Y., Shukrullah, S., Ghaffar, A., Rehman, N. U.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Hindawi Publishing Corporation 2014
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3933234/
https://www.ncbi.nlm.nih.gov/pubmed/24683326
http://dx.doi.org/10.1155/2014/279868

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3933234/
https://www.ncbi.nlm.nih.gov/pubmed/24683326
http://dx.doi.org/10.1155/2014/279868

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