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Development of Simple Designs of Multitip Probe Diagnostic Systems for RF Plasma Characterization
Multitip probes are very useful diagnostics for analyzing and controlling the physical phenomena occurring in low temperature discharge plasmas. However, DC biased probes often fail to perform well in processing plasmas. The objective of the work was to deduce simple designs of DC biased multitip pr...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Hindawi Publishing Corporation
2014
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3933234/ https://www.ncbi.nlm.nih.gov/pubmed/24683326 http://dx.doi.org/10.1155/2014/279868 |