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Polycrystalline Silicon ISFETs on Glass Substrate

The Ion Sensitive Field Effect Transistor (ISFET) operation based on polycrystalline silicon thin film transistors is reported. These devices can be fabricated on inexpensive disposable substrates such as glass or plastics and are, therefore, promising candidates for low cost single-use intelligent...

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Detalles Bibliográficos
Autores principales: Yan, Feng, Estrela, Pedro, Mo, Yang, Migliorato, Piero, Maeda, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2005
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3933903/