Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures

Three-way scanning electron microscope (SEM) moiré was first generated using a designed three-way electron beam (EB) in an SEM. The spot-type three-way SEM moiré comes from the interference between the three-way EB and the specimen grating in which the periodic cells are arranged in a triangular man...

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Detalles Bibliográficos
Autores principales: Wang, Qinghua, Kishimoto, Satoshi, Tsuda, Hiroshi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Hindawi Publishing Corporation 2014
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3944902/
https://www.ncbi.nlm.nih.gov/pubmed/24688377
http://dx.doi.org/10.1155/2014/281954

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3944902/
https://www.ncbi.nlm.nih.gov/pubmed/24688377
http://dx.doi.org/10.1155/2014/281954

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