SU-8 Guiding Layer for Love Wave Devices

SU-8 is a technologically important photoresist used extensively for the fabrication of microfluidics and MEMS, allowing high aspect ratio structures to be produced. In this work we report the use of SU-8 as a Love wave sensor guiding layer which allows the possibility of integrating a guiding layer...

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Detalles Bibliográficos
Autores principales: Roach, Paul, Atherton, Shaun, Doy, Nicola, McHale, Glen, Newton, Michael I.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Molecular Diversity Preservation International (MDPI) 2007
Materias:
Full Paper
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3965230/
https://www.ncbi.nlm.nih.gov/pubmed/28903244

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3965230/
https://www.ncbi.nlm.nih.gov/pubmed/28903244

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