Large Electric Field–Enhanced–Hardness Effect in a SiO(2) Film

Silicon dioxide films are extensively used in nano and micro–electromechanical systems. Here we studied the influence of an external electric field on the mechanical properties of a SiO(2) film by using nanoindentation technique of atomic force microscopy (AFM) and friction force microscopy (FFM). A...

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Detalles Bibliográficos
Autores principales: Revilla, Reynier I., Li, Xiao-Jun, Yang, Yan-Lian, Wang, Chen
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3970131/
https://www.ncbi.nlm.nih.gov/pubmed/24681517
http://dx.doi.org/10.1038/srep04523

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3970131/
https://www.ncbi.nlm.nih.gov/pubmed/24681517
http://dx.doi.org/10.1038/srep04523

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