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Large Electric Field–Enhanced–Hardness Effect in a SiO(2) Film
Silicon dioxide films are extensively used in nano and micro–electromechanical systems. Here we studied the influence of an external electric field on the mechanical properties of a SiO(2) film by using nanoindentation technique of atomic force microscopy (AFM) and friction force microscopy (FFM). A...
Autores principales: | Revilla, Reynier I., Li, Xiao-Jun, Yang, Yan-Lian, Wang, Chen |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group
2014
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3970131/ https://www.ncbi.nlm.nih.gov/pubmed/24681517 http://dx.doi.org/10.1038/srep04523 |
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