Fabrication of TiN nanostructure as a hydrogen peroxide sensor by oblique angle deposition

Nanostructured titanium nitride (TiN) films with varying porosity were prepared by the oblique angle deposition technique (OAD). The porosity of films increases as the deposition angle becomes larger. The film obtained at an incident angle of 85° exhibits the best catalytic activity and sensitivity...

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Detalles Bibliográficos
Autores principales: Xie, Zheng, Liu, Xiangxuan, Wang, Weipeng, Liu, Can, Li, Zhengcao, Zhang, Zhengjun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3975935/
https://www.ncbi.nlm.nih.gov/pubmed/24589278
http://dx.doi.org/10.1186/1556-276X-9-105

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3975935/
https://www.ncbi.nlm.nih.gov/pubmed/24589278
http://dx.doi.org/10.1186/1556-276X-9-105

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