Interferometric Backward Third Harmonic Generation Microscopy for Axial Imaging with Accuracy Beyond the Diffraction Limit

A new nonlinear microscopy technique based on interference of backward-reflected third harmonic generation (I-THG) from multiple interfaces is presented. The technique is used to measure height variations or changes of a layer thickness with an accuracy of up to 5 nm. Height variations of a patterne...

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Detalles Bibliográficos
Autores principales: Sandkuijl, Daaf, Kontenis, Lukas, Coelho, Nuno M., McCulloch, Christopher, Barzda, Virginijus
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Public Library of Science 2014
Materias:
Research Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3978065/
https://www.ncbi.nlm.nih.gov/pubmed/24710103
http://dx.doi.org/10.1371/journal.pone.0094458

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3978065/
https://www.ncbi.nlm.nih.gov/pubmed/24710103
http://dx.doi.org/10.1371/journal.pone.0094458

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