Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures

We demonstrate a time-efficient and low-cost approach to fabricate Si(3)N(4) coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si(3)N(4) coating are formed via dry etching and thin film deposition process. By u...

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Detalles Bibliográficos
Autores principales: Ou, Yiyu, Zhu, Xiaolong, Jokubavicius, Valdas, Yakimova, Rositza, Mortensen, N. Asger, Syväjärvi, Mikael, Xiao, Sanshui, Ou, Haiyan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3983593/
https://www.ncbi.nlm.nih.gov/pubmed/24722521
http://dx.doi.org/10.1038/srep04662

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3983593/
https://www.ncbi.nlm.nih.gov/pubmed/24722521
http://dx.doi.org/10.1038/srep04662

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