Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures

We demonstrate a time-efficient and low-cost approach to fabricate Si(3)N(4) coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si(3)N(4) coating are formed via dry etching and thin film deposition process. By u...

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Detalles Bibliográficos
Autores principales: Ou, Yiyu, Zhu, Xiaolong, Jokubavicius, Valdas, Yakimova, Rositza, Mortensen, N. Asger, Syväjärvi, Mikael, Xiao, Sanshui, Ou, Haiyan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3983593/
https://www.ncbi.nlm.nih.gov/pubmed/24722521
http://dx.doi.org/10.1038/srep04662
Descripción
Sumario:We demonstrate a time-efficient and low-cost approach to fabricate Si(3)N(4) coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si(3)N(4) coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.

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