Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures

We demonstrate a time-efficient and low-cost approach to fabricate Si(3)N(4) coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si(3)N(4) coating are formed via dry etching and thin film deposition process. By u...

Descripción completa

Detalles Bibliográficos
Autores principales: Ou, Yiyu, Zhu, Xiaolong, Jokubavicius, Valdas, Yakimova, Rositza, Mortensen, N. Asger, Syväjärvi, Mikael, Xiao, Sanshui, Ou, Haiyan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3983593/
https://www.ncbi.nlm.nih.gov/pubmed/24722521
http://dx.doi.org/10.1038/srep04662
_version_ 1782311348951056384
author Ou, Yiyu
Zhu, Xiaolong
Jokubavicius, Valdas
Yakimova, Rositza
Mortensen, N. Asger
Syväjärvi, Mikael
Xiao, Sanshui
Ou, Haiyan
author_facet Ou, Yiyu
Zhu, Xiaolong
Jokubavicius, Valdas
Yakimova, Rositza
Mortensen, N. Asger
Syväjärvi, Mikael
Xiao, Sanshui
Ou, Haiyan
author_sort Ou, Yiyu
collection PubMed
description We demonstrate a time-efficient and low-cost approach to fabricate Si(3)N(4) coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si(3)N(4) coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future.
format Online
Article
Text
id pubmed-3983593
institution National Center for Biotechnology Information
language English
publishDate 2014
publisher Nature Publishing Group
record_format MEDLINE/PubMed
spelling pubmed-39835932014-04-11 Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures Ou, Yiyu Zhu, Xiaolong Jokubavicius, Valdas Yakimova, Rositza Mortensen, N. Asger Syväjärvi, Mikael Xiao, Sanshui Ou, Haiyan Sci Rep Article We demonstrate a time-efficient and low-cost approach to fabricate Si(3)N(4) coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si(3)N(4) coating are formed via dry etching and thin film deposition process. By using this method, a significant broadband surface antireflection and a considerable omnidirectional luminescence enhancement are obtained. The experimental observations are then supported by numerical simulations. It is believed that our fabrication method will be well suitable for large-scale production in the future. Nature Publishing Group 2014-04-11 /pmc/articles/PMC3983593/ /pubmed/24722521 http://dx.doi.org/10.1038/srep04662 Text en Copyright © 2014, Macmillan Publishers Limited. All rights reserved http://creativecommons.org/licenses/by/3.0/ This work is licensed under a Creative Commons Attribution 3.0 Unported License. The images in this article are included in the article's Creative Commons license, unless indicated otherwise in the image credit; if the image is not included under the Creative Commons license, users will need to obtain permission from the license holder in order to reproduce the image. To view a copy of this license, visit http://creativecommons.org/licenses/by/3.0/
spellingShingle Article
Ou, Yiyu
Zhu, Xiaolong
Jokubavicius, Valdas
Yakimova, Rositza
Mortensen, N. Asger
Syväjärvi, Mikael
Xiao, Sanshui
Ou, Haiyan
Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures
title Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures
title_full Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures
title_fullStr Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures
title_full_unstemmed Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures
title_short Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures
title_sort broadband antireflection and light extraction enhancement in fluorescent sic with nanodome structures
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3983593/
https://www.ncbi.nlm.nih.gov/pubmed/24722521
http://dx.doi.org/10.1038/srep04662
work_keys_str_mv AT ouyiyu broadbandantireflectionandlightextractionenhancementinfluorescentsicwithnanodomestructures
AT zhuxiaolong broadbandantireflectionandlightextractionenhancementinfluorescentsicwithnanodomestructures
AT jokubaviciusvaldas broadbandantireflectionandlightextractionenhancementinfluorescentsicwithnanodomestructures
AT yakimovarositza broadbandantireflectionandlightextractionenhancementinfluorescentsicwithnanodomestructures
AT mortensennasger broadbandantireflectionandlightextractionenhancementinfluorescentsicwithnanodomestructures
AT syvajarvimikael broadbandantireflectionandlightextractionenhancementinfluorescentsicwithnanodomestructures
AT xiaosanshui broadbandantireflectionandlightextractionenhancementinfluorescentsicwithnanodomestructures
AT ouhaiyan broadbandantireflectionandlightextractionenhancementinfluorescentsicwithnanodomestructures

Ejemplares similares