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Broadband Antireflection and Light Extraction Enhancement in Fluorescent SiC with Nanodome Structures
We demonstrate a time-efficient and low-cost approach to fabricate Si(3)N(4) coated nanodome structures in fluorescent SiC. Nanosphere lithography is used as the nanopatterning method and SiC nanodome structures with Si(3)N(4) coating are formed via dry etching and thin film deposition process. By u...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group
2014
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3983593/ https://www.ncbi.nlm.nih.gov/pubmed/24722521 http://dx.doi.org/10.1038/srep04662 |