Deposition of F-doped ZnO transparent thin films using ZnF(2)-doped ZnO target under different sputtering substrate temperatures

Highly transparent and conducting fluorine-doped ZnO (FZO) thin films were deposited onto glass substrates by radio-frequency (RF) magnetron sputtering, using 1.5 wt% zinc fluoride (ZnF(2))-doped ZnO as sputtering target. Structural, electrical, and optical properties of the FZO thin films were inve...

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Detalles Bibliográficos
Autores principales: Wang, Fang-Hsing, Yang, Cheng-Fu, Lee, Yen-Hsien
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Nano Express
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3984747/
https://www.ncbi.nlm.nih.gov/pubmed/24572004
http://dx.doi.org/10.1186/1556-276X-9-97

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC3984747/
https://www.ncbi.nlm.nih.gov/pubmed/24572004
http://dx.doi.org/10.1186/1556-276X-9-97

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