Enhanced Sensitivity of Surface Acoustic Wave-Based Rate Sensors Incorporating Metallic Dot Arrays

A new surface acoustic wave (SAW)-based rate sensor pattern incorporating metallic dot arrays was developed in this paper. Two parallel SAW delay lines with a reverse direction and an operation frequency of 80 MHz on a same X-112°Y LiTaO(3) wafer are fabricated as the feedback of two SAW oscillators...

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Detalles Bibliográficos
Autores principales: Wang, Wen, Shao, Xiuting, Liu, Xinlu, Liu, Jiuling, He, Shitang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4003923/
https://www.ncbi.nlm.nih.gov/pubmed/24577520
http://dx.doi.org/10.3390/s140303908

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4003923/
https://www.ncbi.nlm.nih.gov/pubmed/24577520
http://dx.doi.org/10.3390/s140303908

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