Titanium Dioxide Nanoparticle Humidity Microsensors Integrated with Circuitry on-a-Chip

A humidity microsensor integrated with a readout circuit on-a-chip fabricated using the commercial 0.18 μm CMOS (complementary metal oxide semiconductor) process was presented. The integrated sensor chip consists of a humidity sensor and a readout circuit. The humidity sensor is composed of a sensit...

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Detalles Bibliográficos
Autores principales: Hu, Yu-Chih, Dai, Ching-Liang, Hsu, Cheng-Chih
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2014
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4003938/
https://www.ncbi.nlm.nih.gov/pubmed/24594612
http://dx.doi.org/10.3390/s140304177

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4003938/
https://www.ncbi.nlm.nih.gov/pubmed/24594612
http://dx.doi.org/10.3390/s140304177

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