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Effect of mold treatment by solvent on PDMS molding into nanoholes

Polydimethylsiloxane (PDMS) is the most popular and versatile material for soft lithography due to its flexibility and easy fabrication by molding process. However, for nanoscale patterns, it is challenging to fill uncured PDMS into the holes or trenches on the master mold that is coated with a sila...

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Detalles Bibliográficos
Autores principales: Con, Celal, Cui, Bo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2013
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4015600/
https://www.ncbi.nlm.nih.gov/pubmed/24059263
http://dx.doi.org/10.1186/1556-276X-8-394