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An Accurate and Computationally Efficient Model for Membrane-Type Circular-Symmetric Micro-Hotplates
Ideally, the design of high-performance micro-hotplates would require a large number of simulations because of the existence of many important design parameters as well as the possibly crucial effects of both spread and drift. However, the computational cost of FEM simulations, which are the only av...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2014
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4029629/ https://www.ncbi.nlm.nih.gov/pubmed/24763214 http://dx.doi.org/10.3390/s140407374 |