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Fabrication of nanochannels with ladder nanostructure at the bottom using AFM nanoscratching method

This letter presents a novel atomic force microscopy (AFM)-based nanomanufacturing method combining the tip scanning with the high-precision stage movement to fabricate nanochannels with ladder nanostructure at the bottom by continuous scanning with a fixed scan size. Different structures can be obt...

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Detalles Bibliográficos
Autores principales: Yan, Yongda, Geng, Yanquan, Hu, Zhenjiang, Zhao, Xuesen, Yu, Bowen, Zhang, Qi
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Springer 2014
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC4039066/
https://www.ncbi.nlm.nih.gov/pubmed/24940171
http://dx.doi.org/10.1186/1556-276X-9-212